JPH0335932U - - Google Patents

Info

Publication number
JPH0335932U
JPH0335932U JP9597589U JP9597589U JPH0335932U JP H0335932 U JPH0335932 U JP H0335932U JP 9597589 U JP9597589 U JP 9597589U JP 9597589 U JP9597589 U JP 9597589U JP H0335932 U JPH0335932 U JP H0335932U
Authority
JP
Japan
Prior art keywords
wafer
transports
floats
large number
injection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9597589U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9597589U priority Critical patent/JPH0335932U/ja
Publication of JPH0335932U publication Critical patent/JPH0335932U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP9597589U 1989-08-16 1989-08-16 Pending JPH0335932U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9597589U JPH0335932U (en]) 1989-08-16 1989-08-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9597589U JPH0335932U (en]) 1989-08-16 1989-08-16

Publications (1)

Publication Number Publication Date
JPH0335932U true JPH0335932U (en]) 1991-04-08

Family

ID=31645204

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9597589U Pending JPH0335932U (en]) 1989-08-16 1989-08-16

Country Status (1)

Country Link
JP (1) JPH0335932U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014010862A (ja) * 2012-06-29 2014-01-20 Fujitsu Ltd ライブラリ装置

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